A discharge can be ignited and plasma can be sustained when a DC voltage that is delivered to the gas medium via electrodes is higher than the
breakdown voltage for the gas. The relationship between this breakdown voltage and the product of
p and
d - where p is the gas pressure and d is the distance between the electrodes—is referred to as
Paschen's law. For a range of gas molecules, the breakdown voltage estimated by
Paschen's law has a minimum value of around pd = 1-10 Torr cm. This suggests that in order to get a practical breakdown voltage for the gas discharge to ignite, a smaller electrode-gap distance is preferred as gas pressure increases. The Paschen-minimum condition at atmospheric pressure can be reached at a gap spacing of considerably less than a millimeter, at which point a few hundreds of volt should be the DC voltage needed for the gas breakdown. However, the breakdown DC voltage for argon gas at atmospheric pressure is predicted to rise to a few kV at a gap spacing of 5 mm. Reducing the breakdown voltage is advantageous from a plasma source design perspective since it allows for handling flexibility and easier source operation. The use of higher-frequency HF voltage sources is one approach to reducing the breakdown voltage. As the pressure increases, the transfer of energy from electrons to gas molecules and ions through collisions becomes more efficient, resulting in the establishment of
thermal equilibrium among electrons, gas molecules, and ions. However, it is possible to inhibit the energy transfer between the electrons and the gas molecules and ions. Dielectric barrier discharge (DBD) is one of the main ways to produce low-temperature plasmas in a non-equilibrium condition at atmospheric pressure. Additionally, there have been reports stating that the Atmospheric-pressure
glow discharge, when powered by a low-frequency (10-100 kHz) source, needs a dielectric barrier on one side of the electrodes to ensure stable and consistent operation. However, when the operating frequency is increased to RF, reaching frequencies as high as 13.56 MHz, the stability of the plasma greatly improves, making the dielectric barrier no longer necessary for stable operation. == Technical significance ==