For experimental characterization, a distinction must be made between contact resistance evaluation in two-electrode systems (for example, diodes) and three-electrode systems (for example, transistors). In two-electrode systems, specific contact resistivity is experimentally defined as the slope of the
I–V curve at : : r_\text{c} = \left\{ \frac{\partial V}{\partial J} \right\}_{V=0} where J is the current density, or current per area. The units of specific contact resistivity are typically therefore in ohm-square metre, or Ω⋅m2. When the current is a linear function of the voltage, the device is said to have
ohmic contacts.
Inductive and
capacitive methods could be used in principle to measure an intrinsic
impedance without the complication of contact resistance. In practice,
direct current methods are more typically used to determine resistance. The three electrode systems such as transistors require more complicated methods for the contact resistance approximation. The most common approach is the
transmission line model (TLM). Here, the total device resistance R_\text{tot} is plotted as a function of the channel length: : R_\text{tot} = R_\text{c} + R_\text{ch} = R_\text{c} + \frac{L}{W C \mu \left(V_\text{gs} - V_\text{ds}\right)} where R_\text{c} and R_\text{ch} are contact and channel resistances, respectively, L/W is the channel length/width, C is gate insulator capacitance (per unit of area), \mu is carrier mobility, and V_\text{gs} and V_\text{ds} are gate-source and drain-source voltages. Therefore, the linear extrapolation of total resistance to the zero channel length provides the contact resistance. The slope of the linear function is related to the channel transconductance and can be used for estimation of the ”contact resistance-free” carrier mobility. The approximations used here (linear potential drop across the channel region, constant contact resistance, ...) lead sometimes to the channel dependent contact resistance. == Mechanisms ==