Research groups
IMTEK consists of the following research groups, each led by a tenured professor: • MEMS Applications • Assembly and Packaging • Biomedical Microtechnology • Bio Microtechnics • Bio- and Nano-Photonics • Chemistry and Physics of Interfaces • Electrical Instrumentation • Design of Microsystems • Microsystem Materials • Micro-actuators • Microelectronics • Micro-optics • Nanotechnology • Process Technology • Sensors • Simulation • Systems Theory • Compound Semiconductor Microsystems • Materials Process Technology In addition, IMTEK has established interdisciplinary graduate colleges for the following themes: • Embedded Microsystems • Micro Energy Harvesting == Cleanroom ==