In the 17th century,
Robert Hooke and
Antonie van Leeuwenhoek both developed techniques to make small glass lenses for use with their
microscopes. Hooke melted small filaments of
Venetian glass and allowed the
surface tension in the molten glass to form the smooth spherical surfaces required for lenses, then mounting and grinding the lenses using conventional methods. The principle has been repeated by performing
photolithography into materials such as
photoresist or
UV curable
epoxy and melting the polymer to form arrays of multiple lenses. More recently microlens arrays have been fabricated using convective assembly of colloidal particles from suspension. Advances in technology have enabled micro-lenses to be designed and fabricated to close tolerances by a variety of methods. In most cases multiple copies are required and these can be formed by
moulding or
embossing from a master lens array. The master lens array may also be replicated through the generation of an
electroform using the master lens array as a
mandrel. The ability to fabricate arrays containing thousands or millions of precisely spaced lenses has led to an increased number of applications. The optical efficiency of diffracting lenses depends on the shape of the groove structure and, if the ideal shape can be approximated by a series of steps or multilevels, the structures may be fabricated using technology developed for the
integrated circuit industry, such as
wafer-level optics. The study of such diffracting lenses is known as
binary optics. Micro-lenses in recent imaging chips have attained smaller and smaller sizes. The Samsung NX1 mirrorless system camera packs 28.2 million micro-lenses onto its CMOS imaging chip, one per photo-site, each with a side length of just 3.63 micrometer. For smartphones this process is miniaturized even further: The Samsung Galaxy S6 has a CMOS sensor with pixels only 1.12 micrometer each. These pixels are covered with micro-lenses of an equally small pitch. Micro-lenses can be also made from liquids. Recently, a glass-like resilient free-form micro-lenses were realized via ultra-fast laser 3D
nanolithography technique. The sustained ~2 GW/cm2 intensity for femtosecond pulsed irradiation shows its potential in high power and/or harsh environment applications. Bio-microlenses have been developed to image biological specimens without causing damage. These can be made from a single cell attached to a fiber probe.
Wafer-level optics Wafer-level optics (WLO) enables the design and manufacture of miniaturized optics at the wafer level using advanced
semiconductor-like techniques. The end product is cost effective, miniaturized optics that enable the reduced form factor of camera modules for
mobile devices. The technology is scalable from a single-element CIF/VGA lens to a multi-element
mega pixel lens structure, where the lens wafers are precision aligned, bonded together and diced to form multi-element lens stacks. As of 2009 the technology was used in about 10 percent of the mobile phone camera lens market. Semiconductor stacking methodology can now be used to fabricate wafer-level optical elements in a chip scale package. The result is a wafer-level camera module that measures .575 mm x 0.575 mm. The module can be integrated into a catheter or endoscope with a diameter as small as 1.0 mm. ==Applications==