Nanosensors was founded as "Nanoprobe" in 1990, building on research conducted at
IBM Sindelfingen on fundamental technologies required for the batch processing of silicon AFM probes using
bulk micromachining. In 1993, Nanosensors commercialized
SPM and AFM probes worldwide. Their developments in batch processing technologies for producing
AFM probes contributed to introducing
Atomic Force Microscopes into the industry of the time. In recognition of this achievement, Nanosensors discerned the Dr.-Rudolf-Eberle Innovation Award of the German State of
Baden-Württemberg and the Innovation Prize of the German Industry in 1995 and the Innovation Award of the Förderkreis für die Mikroelektronik e.V. in 1999. In 2002, Nanosensors was acquired by and integrated into Switzerland-based
NanoWorld. It is still an independent business unit. == Significance ==