Inchworm motor The inchworm motor uses piezoelectric ceramics to push a
stator using a walking-type motion. These piezoelectric motors use three groups of crystals—two 'locking', and one 'motive' that permanently connects to either the motor's casing or stator (not both). The motive group, sandwiched between the other two, provides the motion. The non-powered behaviour of this piezoelectric motor is one of two options: 'normally locked' or 'normally free'. A normally free type allows free movement when unpowered but can still be locked by applying a voltage. Inchworm motors can achieve nanometre-scale positioning by varying the voltage applied to the motive crystal while one set of locking crystals is engaged.
Stepping actions The actuation process of the inchworm motor is a multistep cyclical process:
Slip-stick motor The mechanism of slip-stick motors rely on the inertia in combination with the difference between static and dynamic friction. The stepping action consists of a slow extension phase where static friction is not overcome, followed by a rapid contraction phase where static friction is overcome and the point of contact between the motor and moving part is changed.
Direct drive motors The direct drive piezoelectric motor creates movement through continuous ultrasonic vibration. Its control circuit applies a two-channel sinusoidal or square wave to the piezoelectric elements that matches the
bending resonant frequency of the threaded tube—typically an ultrasonic frequency of 40 kHz to 200 kHz. This creates orbital motion that drives the screw. A second drive type, the squiggle motor, uses piezoelectric elements bonded orthogonally to a nut. Their ultrasonic vibrations rotate a central lead screw.
Single action Very simple single-action stepping motors can be made with piezoelectric crystals. For example, with a hard and rigid rotor-spindle coated with a thin layer of a softer material (like a
polyurethane rubber), a series of angled piezoelectric
transducers can be arranged. (see Fig. 2). When the control circuit triggers one group of transducers, they push the rotor one step. This design cannot make steps as small or precise as more complex designs, but can reach higher speeds and is cheaper to manufacture. == Patents ==