In January 1763, he married Henrietta Maria Legh, daughter of Peter Legh (1706–1792) of
Lyme Park and
Bank Hall. Together, they were the parents of two sons, who died young, and four daughters. they had twelve children. Gwillym took name of Atherton in 1779. He died in France on 9 July 1783.
Legacy In 1766 at the age of 25, both he and his family were painted by
Joseph Wright of Derby The family portraits were inherited by his eldest daughter, Henrietta Maria Vernon Atherton, the wife of Thomas Powys, 2nd Baron Lilford and remained under the ownership of the Lilford family until 1961. ==Descendants==