Exfoliation Exfoliation is a
top down approach. In the bulk form, TMDs are crystals made of layers, which are coupled by Van-der-Waals forces. These interactions are weaker than the
chemical bonds between the Mo and S in MoS2, for example. So TMD monolayers can be produced by micromechanical cleavage, just as graphene. The crystal of TMD is rubbed against the surface of another material (any solid surface). In practice, adhesive tape is placed on the TMD bulk material and subsequently removed. The adhesive tape, with tiny TMD flakes coming off the bulk material, is brought down onto a substrate. On removing the adhesive tape from the substrate, TMD monolayer and multilayer flakes are deposited. This technique produces small samples of monolayer material, typically about 5–10 micrometers in diameter. Large quantities of exfoliated material can also be produced using liquid-phase exfoliation by blending TMD materials with solvents and polymers.
Chemical vapor deposition Chemical vapor deposition (CVD) is another approach used to synthesize transition-metal dichalcogenides. It has been used broadly to synthesize many different TMDs because it can be easily adapted for different TMD materials. Generally, CVD growth of TMDs is achieved by putting precursors to the material, typically a transition-metal oxide and pure chalcogen, into a furnace with the substrate on which the material will form. The furnace is heated to high temperatures (anywhere from 650 to 1000 °C) with an
inert gas, typically N2 or Ar, flowing through the tube. Outside of traditional CVD, metal organic chemical vapor deposition (MOCVD) has been used to synthesize TMDs. Unlike traditional CVD described above, MOCVD uses gaseous precursors, as opposed to solid precursors and MOCVD is usually carried out at lower temperatures, anywhere from 300 to 900 °C. MOCVD has been shown to provide more consistent wafer-scale growth than traditional CVD. CVD is often used over mechanical exfoliation despite its added complexity because it can produce monolayers ranging anywhere from 5 to 100 microns in size as opposed to the surface areas of roughly 5-10 microns produced using the mechanical exfoliation method. Not only do TMD monolayers produced by CVD have a larger surface area than those flakes produced by mechanical exfoliation, they are often more uniform. Monolayer TMD flakes with very little or no multilayer areas can be produced by chemical vapor deposition, in contrast to samples produced by mechanical exfoliation, which often have many multilayered areas. Geometrically confined-growth techniques are also recently applied to realize wafer-scale single-domain TMD monolayer arrays and their heterostructures.
Molecular-beam epitaxy Molecular-beam epitaxy (MBE) is an established technique for growing semiconductor devices with atomic monolayer thickness control. MBE has been used to grow different TMDs, such as MoSe2, WSe2, and early
transition metals, including
titanium,
vanadium, and
chromium, tellurides, resulting in extremely clean samples with a thickness of only 0.5 monolayer. The evaporation cells are either
Knudsen cells or
electron beam evaporation based, depending on the materials; electron beam evaporation works with rods and can be used to reach high temperatures without overheating heating filaments, while Knudsen cells are suitable for powders and materials with a lower evaporation point. The evaporated materials are then directed towards the substrate; some common ones are
MoS2,
HOPG,
mica, or a sapphire substrate, such as
Al2O3. A specific substrate is chosen to fit the targeted growth the best. The substrate is kept heated during the process to enhance the growth, with the temperatures ranging from 300 °C to 700 °C. The temperature of the substrate is one key factor of the growth, and altering it can be used to grow different phases, such as 1T and 2H, of the same material. The improvement in sample quality is considerable when compared to exfoliation, as MBE is more effective in getting rid of the large flakes and impurities. In contrast to CVD, MBE proves beneficial when single-layerd TMDs are required. The materials have so far shown continuous films of good uniformity but typically require annealing temperatures > 500 °C. Electrodepositions of TMDC films have been successfully reported over conducting films such as graphene and TiN, and over a SiO2 insulator by growing the TMDC laterally starting from a conductive film.
Colloidal Synthesis A strategy for colloidal synthesis from soluble transition metal and sulfur precursors was found recently, yielding highly defined nanoplatelets and nanosheets with a thickness of 1-2 monolayers. == Electronic band structure ==