mechanism of today's
NOR-type FLASH memory cell.
Å = 10
m. mechanism of today's
NOR-type FLASH memory cell Early attempts In the early 1970s, some studies,
inventions, and development for electrically re-programmable
non-volatile memories were performed by various companies and organizations. In 1971, early research was presented at
the 3rd Conference on Solid State Devices, Tokyo in Japan by Yasuo Tarui, Yutaka Hayashi, and Kiyoko Nagai at
Electrotechnical Laboratory; a Japanese national research institute. They
fabricated an electrically re-programmable non-volatile memory in 1972, and continued this study for more than 10 years. However this early memory depended on capacitors to work, Later that year, an avalanche injection type MOS was patented by
Fujio Masuoka, the inventor of
flash memory, at Toshiba and IBM patented another later that year. In 1974,
NEC patented an electrically erasable carrier injection device. The next year, NEC applied for the trademark "EEPROM®" with the Japan Patent Office. The trademark was granted in 1978. The theoretical basis of these devices is
avalanche hot-carrier injection. In general, programmable memories, including EPROM, of early 1970s had reliability and endurance problems such as the data retention periods and the number of erase/write cycles. Most of the major semiconductor manufactures, such as
Toshiba,
IBM,
Intel,
NEC (later,
Renesas Electronics),
Philips (later,
NXP Semiconductors),
Siemens (later,
Infineon Technologies),
Honeywell (later,
Atmel),
Texas Instruments, studied, invented, and manufactured some electrically re-programmable non-volatile devices until 1977.
Modern EEPROM The first EEPROM that used
Fowler-Nordheim tunnelling to erase data was invented by Bernward and patented by
Siemens in 1974. In February 1977, Israeli-American
Eliyahou Harari at
Hughes Aircraft Company patented in the US a modern EEPROM technology, based on Fowler-Nordheim tunnelling through a thin
silicon dioxide layer between the
floating-gate and the
wafer. Hughes went on to produce this new EEPROM devices. In May 1977, some important research result was disclosed by
Fairchild and
Siemens. They used
SONOS (
polysilicon-
oxynitride-
nitride-
oxide-
silicon) structure with thickness of silicon dioxide less than 30
Å, and
SIMOS (stacked-gate
injection MOS) structure, respectively, for using
Fowler-Nordheim tunnelling hot-carrier injection. Around 1976 to 1978, Intel's team, including
George Perlegos, made some inventions to improve this tunneling E2PROM technology. In 1978, they developed a 16K (2K word × 8) bit
Intel 2816 chip with a thin
silicon dioxide layer, which was less than 200
Å. In 1980, this structure was publicly introduced as
FLOTOX;
floating gate tunnel oxide. The
FLOTOX structure improved reliability of erase/write cycles per byte up to 10,000 times. But this device required additional 2022V VPP bias voltage supply for byte erase, except for 5V read operations. In 1981, Perlegos and 2 other members left Intel to form
Seeq Technology, which used on-device
charge pumps to supply the high voltages necessary for programming E2PROMs. In 1984, Perlogos left Seeq Technology to found
Atmel, then Seeq Technology was acquired by Atmel. Electrically alterable read-only memory (EAROM) is a type of EEPROM that can be modified one or a few
bits at a time. Writing is a very slow process and again needs higher voltage (usually around 12
V) than is used for read access. EAROMs are intended for applications that require infrequent and only partial rewriting. ==Theoretical basis of FLOTOX structure==