Early analog sensors for visible light were
video camera tubes. They date back to the 1930s, and several types were developed up until the 1980s. By the early 1990s, they had been replaced by modern
solid-state CCD image sensors. The basis for modern solid-state image sensors is MOS technology, which originates from the invention of the MOSFET by
Mohamed M. Atalla and
Dawon Kahng at
Bell Labs in 1959. Later research on MOS technology led to the development of solid-state
semiconductor image sensors, including the
charge-coupled device (CCD) and later the
active-pixel sensor (
CMOS sensor). It is a type of
photodiode array, with pixels containing a
p-n junction, integrated
capacitor, and MOSFETs as selection
transistors. A photodiode array was proposed by G. Weckler in 1968.
Charge-coupled device The
charge-coupled device (CCD) was invented by
Willard S. Boyle and
George E. Smith at Bell Labs in 1969. While researching MOS technology, they realized that an electric charge was the analogy of the magnetic bubble and that it could be stored on a tiny
MOS capacitor. As it was fairly straightforward to
fabricate a series of MOS capacitors in a row, they connected a suitable voltage to them so that the charge could be stepped along from one to the next. Early CCD sensors suffered from
shutter lag. This was largely resolved with the invention of the
pinned photodiode (PPD). It was a
photodetector structure with low lag, low
noise, high
quantum efficiency and low
dark current. The first NMOS APS was fabricated by Tsutomu Nakamura's team at Olympus in 1985. The
CMOS active-pixel sensor (CMOS sensor) was later improved by a group of scientists at the
NASA Jet Propulsion Laboratory in 1993. By the 2010s, CMOS sensors largely displaced CCD sensors in all new applications.
Other image sensors The first commercial
digital camera, the
Cromemco Cyclops in 1975, used a 32×32 MOS image sensor. It was a modified MOS dynamic
RAM (
DRAM)
memory chip. MOS image sensors are widely used in
optical mouse technology. The first optical mouse, invented by
Richard F. Lyon at
Xerox in 1980, used a
5μm NMOS integrated circuit sensor chip. Since the first commercial optical mouse, the
IntelliMouse introduced in 1999, most optical mouse devices use CMOS sensors. In February 2018, researchers at
Dartmouth College announced a new image sensing technology that the researchers call QIS, for Quanta Image Sensor. Instead of pixels, QIS chips have what the researchers call "jots." Each jot can detect a single particle of light, called a
photon. ==See also==