Fabrication with three metal layers (
dielectric has been removed). The sand-colored structures are metal
interconnect, with the vertical pillars being contacts, typically plugs of
tungsten. The reddish structures are polysilicon gates, and the solid at the bottom is the
crystalline silicon bulk. chip, as built in the early 2000s. The graphic shows LDD-MISFET's on an SOI substrate with five metallization layers and solder bump for flip-chip bonding. It also shows the section for
FEOL (front-end of line),
BEOL (back-end of line) and first parts of back-end process. The
semiconductors of the
periodic table of the
chemical elements were identified as the most likely materials for a
solid-state vacuum tube. Starting with
copper oxide, proceeding to
germanium, then
silicon, the materials were systematically studied in the 1940s and 1950s. Today,
monocrystalline silicon is the main
substrate used for ICs although some III-V
compounds of the periodic table such as
gallium arsenide are used for specialized applications like
LEDs,
lasers,
solar cells and the highest-speed integrated circuits. It took decades to perfect methods of creating
crystals with minimal
defects in semiconducting materials'
crystal structure.
Semiconductor ICs are fabricated in a
planar process which includes three key process steps
photolithography, deposition (such as
chemical vapor deposition), and
etching. The main process steps are supplemented by doping and cleaning. More recent or high-performance ICs may instead use
multi-gate FinFET or
GAAFET transistors instead of planar ones, starting at the 22 nm node (Intel) or 16/14 nm nodes.
Mono-crystal silicon
wafers are used in most applications (or for special applications, other semiconductors such as
gallium arsenide are used). The wafer need not be entirely silicon.
Photolithography is used to mark different areas of the substrate to be
doped or to have polysilicon, insulators or metal (typically aluminium or copper) tracks deposited on them.
Dopants are impurities intentionally introduced to a semiconductor to modulate its electronic properties. Doping is the process of adding dopants to a semiconductor material. • Integrated circuits are composed of many overlapping layers, each defined by photolithography, and normally shown in different colors. Some layers mark where various dopants are diffused into the substrate (called diffusion layers), some define where additional ions are implanted (implant layers), some define the conductors (doped polysilicon or metal layers), and some define the connections between the conducting layers (via or contact layers). All components are constructed from a specific combination of these layers. • In a self-aligned
CMOS process, a
transistor is formed wherever the gate layer (polysilicon or metal)
crosses a diffusion layer (this is called
"the self-aligned gate"). •
Capacitive structures, in form very much like the
parallel conducting plates of a traditional electrical
capacitor, are formed according to the area of the "plates", with insulating material between the plates. Capacitors of a wide range of sizes are common on ICs. • Meandering stripes of varying lengths are sometimes used to form on-chip
resistors, though most
logic circuits do not need any resistors. The ratio of the length of the resistive structure to its width, combined with its sheet resistivity, determines the resistance. • More rarely,
inductive structures can be built as tiny on-chip coils, or simulated by
gyrators. Since a CMOS device only draws current on the
transition between
logic states, CMOS devices consume much less current than
bipolar junction transistor devices.
Random-access memory (RAM) is the most regular type of integrated circuit; the highest-density ICs are therefore memories, although even a
microprocessor typically includes on-chip memory. (See the regular array structure at the bottom of the first image.) Although device structures are highly intricate—with feature widths that have been shrinking for decades—the material layers remain much thinner than the lateral dimensions of the devices. These layers are fabricated using a process analogous to
photolithography, but light in the
visible spectrum cannot be used for patterning, as its wavelengths are too large. Instead,
ultraviolet (UV)
photons of shorter wavelength are employed to expose each layer. Because the features are so small,
electron microscopes are essential tools for a
process engineer working on
fabrication process debugging. Each device is tested before packaging using
automated test equipment (ATE), in a procedure known as
wafer testing or wafer probing. The wafer is then cut into rectangular blocks, each known as a
die. Each functional die (plural
dice,
dies, or
die) is connected into a package using
aluminium (or gold)
bond wires, which are attached by
thermosonic bonding.
Thermosonic bonding, first introduced by A. Coucoulas, provided a reliable means of forming electrical connections between the die and the outside world. After packaging, devices undergo final testing on the same or similar ATE used during wafer probing. In addition,
industrial CT scanning can be employed for inspection. Test cost can account for over 25% of total fabrication cost for low-cost products, but is relatively negligible for low-yielding, larger, or higher-cost devices. , a
fabrication facility (commonly known as a
semiconductor fab) can cost over US$12 billion to construct. The cost of a fabrication facility rises over time because of increased complexity of new products; this is known as
Rock's law. Such a facility features: • The
wafers up to 300 mm in diameter (wider than a common
dinner plate). • , 5 nm transistors. •
Copper interconnects where copper wiring replaces aluminum for interconnects. •
Low-κ dielectric insulators. •
Silicon on insulator (SOI). •
Strained silicon in a process used by
IBM known as
Strained silicon directly on insulator (SSDOI). •
Multigate devices such as tri-gate transistors. ICs can be manufactured either in-house by
integrated device manufacturers (IDMs) or using the
foundry model. IDMs are vertically integrated companies (like
Intel and
Samsung) that design, manufacture and sell their own ICs, and may offer design and/or manufacturing (foundry) services to other companies (the latter often to
fabless companies). In the foundry model, fabless companies (like
Nvidia) only design and sell ICs and outsource all manufacturing to
pure play foundries such as
TSMC. These foundries may offer IC design services.
Packaging nMOS chip made in 1977, part of a four-chip
calculator set designed in 1970 The earliest integrated circuits were packaged in ceramic
flat packs, which continued to be used by the
military for many years due to their reliability and compact size. Commercial packaging rapidly shifted to the
dual in-line package (DIP) – first in ceramic, later in
plastic, typically a
cresol–
formaldehyde–
novolac resin. In the 1980s, the
pin count of
VLSI circuits exceeded the practical limit of DIP packaging, leading to the adoption of
pin grid array (PGA) and
leadless chip carrier (LCC) packages.
Surface-mount technology (SMT) emerged in the early 1980s and gained popularity by the late 1980s, offering finer lead pitch and using leads formed as either gull-wing or J-lead. A common example is the
small-outline integrated circuit (SOIC) package – which occupies about 30–50% less board area than an equivalent DIP and is typically 70% thinner – featuring gull-wing leads extending from its two long sides with a standard lead spacing of 0.050 inches. By the late 1990s,
plastic quad flat pack (PQFP) and
thin small-outline package (TSOP) designs became the most common for high pin-count devices, though PGA packages remain in use for high-performance
microprocessors.
Ball grid array (BGA) packaging has existed since the 1970s. The
flip-chip BGA (FCBGA), developed in the 1990s, enables much higher pin counts than most other package types. In an FCBGA, the die is mounted upside-down and connected to the package balls through a substrate similar to a
printed circuit board, rather than by bonding wires. This design allows an array of
input/output (I/O) connections – called Area-I/O – to be distributed across the entire die instead of being limited to its edges. While BGA devices eliminate the need for a dedicated socket, they are significantly more difficult to replace if they fail. Intel transitioned away from PGA to
land grid array (LGA) and BGA beginning in 2004, with the last PGA socket released in 2014 for mobile platforms. , AMD uses PGA packages on mainstream desktop processors, BGA packages on mobile processors, and high-end desktop and server microprocessors use LGA packages. Electrical signals leaving the die must pass through the material electrically connecting the die to the package, through the conductive
traces (paths) in the package, through the leads connecting the package to the conductive traces on the
printed circuit board. The materials and structures used in the path these electrical signals must travel have very different electrical properties, compared to those that travel to different parts of the same die. As a result, they require special design techniques to ensure the signals are not corrupted, and much more electric power than signals confined to the die itself. When multiple dies are put in one package, the result is a
system in package, abbreviated . A
multi-chip module (MCM) is created by combining multiple dies on a small substrate often made of ceramic. The distinction between a large MCM and a small printed circuit board is sometimes fuzzy. Packaged integrated circuits are usually large enough to include identifying information. Four common sections are the manufacturer's name or logo, the part number, a part production batch number and
serial number, and a four-digit date-code to identify when the chip was manufactured. Extremely small
surface-mount technology parts often bear only a number used in a manufacturer's
lookup table to find the integrated circuit's characteristics. The manufacturing date is commonly represented as a two-digit year followed by a two-digit week code, such that a part bearing the code 8341 was manufactured in week 41 of 1983, or approximately in October 1983. == Intellectual property ==